Manual XY stage with precision motorized Z drive for contrast-based autofocus with up to a 150X objective
Capable of measuring features down to 0.5 µm
Available with stage sizes: 100x100x175mm, 200x200x175mm, and 300x300x145mm
Trinocular optics with manual 5-position lens turret and support for BF/DF/DIC/POL observation
Robust capabilities for measuring transparent layers, lines with irregular edges, and more
Programmable LED transmitted and reflected illumination
Line-width repeatability less than 20nm*
VIEW Metrology Software (VMS)
*Note: Assumes 10 trial measurement repeatability of a single chrome-on-glass line-width artifact and at least a 50X front objective.
VMS 10.0.48 (and newer) now has bigger video windows icons
and some redesigned icons
Old Icons
New Icons
QVS Service
VIEW service functions are now performed by Quality Vision Services (QVS).
VIEW upgrades, software support, and application support remain with VIEW.
VMS Training in July
The next software training in Tempe, AZ will be the week of July 29th. VMS Basic is July 29-31 and VMS Advanced is August 1-2. Contact Jim Hyde to reserve your seat and to get a copy of the course syllabus. Elements training is also available. Contact Mark Bensel for information..