Overview
This Webinar will begin with a brief introduction to the motivation for area-selective deposition (ASD), then describe basic concepts and processes in thin film formation, including an overview of reactions, energetics and mechanisms in film deposition and nucleation. Using reports from the literature, we will review current approaches and capabilities for ASD, and finish with discussion of prospects and challenges that need to be overcome in this field.
Who Should Attend
This webinar will be geared to researchers, technologists, and students interested in concepts in surface reactions for atomic-scale thin film processing. Some previous exposure or knowledge of ALD reaction and processes will be helpful, but not necessary for this course.
